杜絕潔凈廠房設(shè)計施工產(chǎn)生污染問題
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- 發(fā)布日期：2017-04-13 17:52:20
1．器件工藝良品率
1 device process yield
在一個污染環(huán)境中制成的器件會引起多種問題。污染會改變器件的尺寸，改變表面的潔凈度，并且/或者造成有凹痕的表面。在潔凈廠房設(shè)計施工 http://www.jnjkjh.com/ 的過程中，有一系列的質(zhì)量檢驗和檢測，他們是為檢測出被污染的晶片而特殊設(shè)計的。高度的污染使得僅有少量的晶片能夠完成全工藝過程，從而導(dǎo)致成本升高。
Devices made in a polluted environment can cause many problems. Pollution can change the size of the device, change the cleanliness of the surface, and / or surface caused by a dent. In the process of the design and construction of a clean house, there is a series of quality inspection and testing, they are specially designed for the detection of contaminated wafers. The high degree of pollution makes only a small number of wafers can complete the whole process, which leads to higher cost.
2．器件性能
2 device performance
一個更為嚴(yán)重的問題是在工藝過程中漏檢的小的污染。晶片看起來是干凈的，但其中的未能檢測出來的顆粒、不需要的化學(xué)物質(zhì)和高濃度的可移動離子污染物，可能會改變器件的電性能。這個問題通常是在芯片切割時的電測試中顯現(xiàn)出來。
A more serious problem is missing in the process of small pollution. The chip appears to be clean, but the failure to detect the particles, do not require the chemical substances and high concentrations of the mobile ion contaminants may change the electrical properties of the device. This problem is usually shown in the electrical tests when the chip is cut.
3．器件可靠性
3 device reliability
最令人擔(dān)心的莫過于污染對器件可靠性的失效影響。小劑量的污染物可能會在工藝過程中進(jìn)入晶片，而未被通常的器件測試檢驗出來。然而，這些污染物會在器件內(nèi)部移動，最終停留在電性敏感區(qū)域，從而引起器件失效。這一失效模式逐漸成為高科技行業(yè)關(guān)注的目標(biāo)。
The most worrying is that the failure of the reliability of the device is affected by pollution. A small dose of contaminants may be in the process of the process, and the test of the device is not usually tested. However, these pollutants will move in the device, and eventually stay in the sensitive area of the device, which can cause the device failure. The failure mode has gradually become the focus of the high-tech industry.
